%0 Journal Article %T A two-dimensional analytical-model-based comparative threshold performance analysis of SOI-SON MOSFETs
Two-dimensional Analytical Model Based Comparative Threshold Performance Analysis of SOI-SON MOSFET %A Sanjoy De %A Saptarsi Ghosh %A N Basanta Singh %A A K De %A Subir Kumar Sarkar %A
Sanjoy De %A Saptarsi Ghosh %A N Basanta Singh %A A K De %A Subir Kumar Sarkar %J 半导体学报 %D 2011 %I %X A generalized threshold voltage model based on two-dimensional Poisson analysis has been developed for SOI/SON MOSFETs. Different short channel field effects, such as fringing fields, junction-induced lateral fields and substrate fields, are carefully investigated, and the related drain-induced barrier-lowering effects are incorporated in the analytical threshold voltage model. Through analytical model-based simulation, the threshold voltage roll-off and subthreshold slope for both structures are compared for different operational and structural parameter variations. Results of analytical simulation are compared with the results of the ATLAS 2D physics-based simulator for verification of the analytical model. The performance of an SON MOSFET is found to be significantly different from a conventional SOI MOSFET. The short channel effects are found to be reduced in an SON, thereby resulting in a lower threshold voltage roll-off and a smaller subthreshold slope. This type of analysis is quite useful to figure out the performance improvement of SON over SOI structures for next generation short channel MOS devices. %K silicon-on-insulator %K silicon-on-nothing %K Poisson's equation %K short channel effects %K threshold voltage roll-off %K subthreshold slope
MOSFET %K SOI结构 %K 阈值电压 %K 性能分析 %K 二维分析 %K 模型基 %K 儿子 %K 基础 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=A0C0AC355ED3D7747EF2C11062CD9342&yid=9377ED8094509821&vid=9971A5E270697F23&iid=F3090AE9B60B7ED1&sid=0EB5D613F74DC53B&eid=DF92D298D3FF1E6E&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=24