%0 Journal Article
%T Study of Micro-Structure Ethanol Gas Sensor Based on La0.7Sr0.3FeO3<br>基于La0.7Sr0.3FeO3的微结构乙醇气体传感器的研制
%A Liu Li
%A Zhang Tong
%A Qi Qi
%A Chen Weiyou
%A Xu Baokun
%A <br>刘丽
%A 张彤
%A 漆奇
%A 陈维友
%A 徐宝琨
%J 半导体学报
%D 2007
%I 
%X This paper presents a novel micro-structure ethanol gas sensor.The heater electrodes and signal electrodes were designed on the same plane in order to reduce cross-talk and make the fabrication easier.The whole design has been simulated using a 3D electro-thermo-mechanical finite element model through Ansys.The nano complex oxide La0.7Sr0.3FeO3 is employed to act as sensitive material coated on the surface of the substrate. Experimental results show that the sensitivity of this novel sensor is 8.0 when the concentration of the ethanol is 500ppm, the power consumption is approximately two thirds of that of commercial sintering gas sensors, the response time is about 1.5s, and the recovery time is about 2.5s.
%K La0
%K 7Sr0
%K 3FeO3
%K nano material
%K micro-structure
%K low power consumption
%K ethanol
%K gas sensor<br>La0.7Sr0.3FeO3
%K 纳米材料
%K 微结构
%K 低功耗
%K 乙醇
%K 气体传感器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=41CD6449C4B7C037&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=E158A972A605785F&sid=44E78A5D1B37D836&eid=9E7C0CB25117E09B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=7