%0 Journal Article
%T Microfabrication and Evaluation of a Silicon MicroelectrodeBased on SOI Wafer<br>基于SOI硅片的硅微电极制作与评估
%A Sui Xiaohong
%A Chen Hongda
%A <br>隋晓红
%A 陈弘达
%J 半导体学报
%D 2008
%I 
%X An implantable seven-channel silicon microelectrode was fabricated by MEMS(micro-electro-mechanical system)micromachining techniques for optic-nerve visual prosthesis applications.Theoretical analyses of noise contributed to de termining the size of the exposed recording sites of the microprobe.The geometr y configuration was optimized for the silicon microprobe to have enough strength and flexibility and to reduce the insertion-induced tissue trauma.Impedance t est results showed that the average value of ...
%K MEMS
%K visual prosthesis
%K silicon microelectrode
%K in-vivo experiment<br>MEMS
%K 视觉修复
%K 硅微电极
%K 在体试验
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=7AE35A0EFA092957423364F857C9E164&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=708DD6B15D2464E8&sid=31EF1FA369BC6521&eid=A7C70BFDC1EB80E9&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=19