%0 Journal Article
%T A Passive Low-Pass Filter on Low-Loss Substrate<br>低损耗衬底上实现无源低通滤波器
%A Fang Jie
%A Liu Zewen
%A Zhao Jiahao
%A Chen Zhongmin
%A Wei Ji
%A Liu Litian
%A Li Zhijian
%A <br>方杰
%A 刘泽文
%A 赵嘉昊
%A 陈忠民
%A 韦嘉
%A 刘理天
%A 李志坚
%J 半导体学报
%D 2006
%I 
%X The loss mechanisms of different passive devices (on-chip inductors and capacitors) on different substrates are analyzed and compared.OPS (oxidized porous silicon) and HR (high-resistivity) substrates are used as low-loss substrates for on-chip planar LPF (low pass filter) fabrication.For the study of substrate loss,a planar coil inductor is also designed.Simulation results show that Q (the quality factor) of the inductor on both substrates is over 20.Measurements of the LPF on OPS substrate give a -3dB bandwidth of 2.9GHz and a midband insertion loss of 0.87dB at 500MHz.The LPF on HR substrate gives a -3dB bandwidth of 2.3GHz and a midband insertion loss of 0.42dB at 500MHz.
%K LC low-pass filter
%K low-loss substrate
%K on-chip inductor
%K RF<br>LC低通滤波器
%K 低损耗衬底
%K 片上电感
%K RF
%K LC
%K low-pass
%K filter
%K low-loss
%K substrate
%K on-chip
%K inductor
%K RF
%K 低损耗
%K 无源低通滤波器
%K Substrate
%K Filter
%K insertion
%K loss
%K Measurements
%K substrate
%K loss
%K bandwidth
%K quality
%K factor
%K Simulation
%K results
%K show
%K planar
%K coil
%K inductor
%K study
%K fabrication
%K passive
%K devices
%K filter
%K used
%K porous
%K silicon
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=199A0A365CC5BE7F&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=9CF7A0430CBB2DFD&sid=FAE014814EB8ABBA&eid=209749DE0D716184&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=17