%0 Journal Article
%T Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method<br>电热微执行器温度分布节点分析模型
%A Li Rengang
%A Huang Qing''an
%A Li Weihua
%A <br>黎仁刚
%A 黄庆安
%A 李伟华
%J 半导体学报
%D 2006
%I 
%X This paper develops a nodal analysis model of in-plane electrothermal microactuators with the Galerkin method based on the weighted residue method.With high accuracy,easy modeling,and clear configuration,the model makes it possible to co-simulate with the control circuit,which means it can simulate the whole system with the electrothermal microactuators.The model is verified by simulation with ANSYS and agrees well with it.
%K :relativity
%K weighted residue method
%K nodal analysis method
%K electrothermal microactuator<br>相关性
%K 加权余量法
%K 节点分析法
%K 热执行器
%K 热微执行器
%K 空间温度分布
%K 节点分析模型
%K Method
%K Residue
%K Weighted
%K Based
%K Analysis
%K Model
%K Nodal
%K Microactuators
%K Electrothermal
%K 仿真结果
%K 验证
%K ANSYS
%K 有效性
%K 等效电路模型
%K 协同仿真
%K 反馈电路
%K 控制电路
%K 结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=CA6625120D200AD9&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=F3090AE9B60B7ED1&sid=3907BD093A0059AA&eid=0BEF78F5D55A0862&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=15