%0 Journal Article
%T Voltage Controlled Oscillator<br>一种基于MEMS的射频低相位噪声压控振荡器的研制
%A Li Li
%A Zhao Zhengping
%A Zhang Zhiguo
%A Guo Wensheng
%A Yang Ruixia
%A <br>李丽
%A 赵正平
%A 张志国
%A 郭文胜
%A 吕苗
%A 杨瑞霞
%J 半导体学报
%D 2006
%I 
%X A 2GHz LC VCO is fabricated using a micromachined variable capacitor for frequency tuning.The MEMS variable capacitors,whose controlling plates and capacitor plates are separated,are fabricated in a surface micromachining process.These devices have a quality factor of 38.462 at 2GHz.The MEMS VCO operating at 2.007GHz achieves a single side band phase-noise of -107.5dBc/Hz at a 100kHz offset from the carrier and an output power of -13.67dBm.On the basis of analysis of VCO mechanical-thermal noise produced from the micromachined variable capacitor,a method for lowering the phase noise by reducing the squeeze damping is proposed and an optimized number of damping holes is obtained.
%K MEMS
%K variable capacitor
%K quality factor
%K VCO
%K phase noise<br>MEMS
%K 可变电容
%K Q值
%K 压控振荡器
%K 相位噪声
%K MEMS
%K 射频
%K 低相位噪声
%K 压控振荡器
%K Voltage
%K Controlled
%K Oscillator
%K 孔数
%K 优化阻尼
%K 方法
%K 压膜阻尼
%K 空气
%K 热噪声
%K 表面微机械
%K 输出功率
%K 单边带
%K 载波频率
%K 测试结果
%K 工艺制造
%K 分离
%K 电容极板
%K 控制极板
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=76C753BA5498A8A1&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=94C357A881DFC066&sid=F3FF3E69C64937E9&eid=46CB56AABC2765FF&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9