%0 Journal Article
%T A novel symmetrical microwave power sensor based on MEMS technology<br>一种基于MEMS技术的新型对称式微波功率传感器
%A Wang Debo
%A Liao Xiaoping
%A <br>王德波
%A 廖小平
%J 半导体学报
%D 2009
%I 
%X A novel symmetrical microwave power sensor based on MEMS technology is presented.In this power sensor,the left section inputs the microwave power,while the right section inputs the DC power.Because of its symmetrical structure,this power sensor provides more accurate microwave power measurement capability without mismatch uncertainty and temperature drift.The loss caused by the microwave signal is simulated in this power sensor.This power sensor is designed and fabricated using GaAs MMIC technology.And it i...
%K symmetrical
%K MEMS
%K GaAs MMIC
%K power sensor<br>对称式：MEMS：GaAs
%K MMIC：功率传感器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2D3571A4CEA988130E7AA2DA05371ADD&yid=DE12191FBD62783C&vid=340AC2BF8E7AB4FD&iid=94C357A881DFC066&sid=CEA8C36EECEB7DAC&eid=38B194292C032A66&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=6