%0 Journal Article
%T Improving the quality factor of an RF spiral inductor with non-uniform metal width and non-uniform coil spacing<br>非均匀金属线宽和线间距射频螺旋电感品质因子的改善
%A Shen Pei
%A Zhang Wanrong
%A Huang Lu
%A Jin Dongyue
%A Xie Hongyun
%A <br>沈珮
%A 张万荣
%A 黄璐
%A 金冬月
%A 谢红云
%J 半导体学报
%D 2011
%I 
%X An improved inductor layout with non-uniform metal width and non-uniform spacing is proposed to increase the quality factor (Q factor). For this inductor layout, from outer coil to inner coil, the metal width is reduced by an arithmetic-progression step, while the metal spacing is increased by a geometric-progression step. An improved layout with variable width and changed spacing is of benefit to the Q factor of RF spiral inductor improvement (approximately 42.86%), mainly due to the suppression of eddy-current loss by weakening the current crowding effect in the center of the spiral inductor. In order to increase the Q factor further, for the novel inductor, a patterned ground shield is used with optimized layout together. The results indicate that, in the range of 0.5 to 16 GHz, the Q factor of the novel inductor is at an optimum, which improves by 67% more than conventional inductors with uniform geometry dimensions (equal width and equal spacing), is enhanced by nearly 23% more than a PGS inductor with uniform geometry dimensions, and improves by almost 20% more than an inductor with an improved layout.
%K inductor layout optimization
%K variable metal width and spacing
%K integrated RF inductor
%K silicon substrate<br>电感布局优化
%K 渐变的金属线宽和线间距
%K 集成射频电感
%K 硅衬底
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=9CB13B1D439D6A7631EB4D07441659F1&yid=9377ED8094509821&vid=9971A5E270697F23&iid=B31275AF3241DB2D&sid=36CB330B3B1D881A&eid=94C357A881DFC066&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0