%0 Journal Article
%T Pulse and Step Signal Response Models of Micro-Accelerometers Based on the Comb Gaps Deviation<br>基于梳齿间距偏差的硅微加速度计冲击与阶跃信号响应模型
%A Dai Qiang
%A Yu Qi
%A Rao Qing
%A Zhou Wei
%A Yang Mohua
%A <br>戴强
%A 于奇
%A 饶青
%A 周伟
%A 杨谟华
%J 半导体学报
%D 2008
%I 
%X Based on probability and statistical theory,pulse and step acceleration signal response models of capacitive micro-accelerometer with single-sided driving mode and double-sided driving mode are investigated,respectively,which are established on the assumption that the comb gaps conform to the uniform distribution within a given scope induced by the MEMS processing non-ideality.The precision of the models has been verified by the FEA and monte carlo methods with ANSYS software.The deviation between them is less than 10%.The models suggest that the reliable operation ranges of the accelerometers will decrease 10%~15% when the comb gaps deviate 0~20% from the ideal value.The models can be used in the estimation of the reliable operation ranges of capacitive accelerometers.
%K micro-accelerometers
%K comb gap
%K pulse and step signal response models
%K reliable operation range<br>微加速度计
%K 梳齿间距
%K 冲击与阶跃信号响应物理模型
%K 可靠工作范围
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=3623DF4D045A84170DA5847C4B8AC8B2&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=DF92D298D3FF1E6E&sid=A5545D8D349C0F70&eid=98973A2DBA64FAC9&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=5