%0 Journal Article
%T A Kind of New Technique of Mixing Gas(Ga)-Solid (Mixed Oxidation Product of Al)-Solid(Si)<br>一种气(Ga)-固(Al掺杂氧化物)-固(Si)掺杂新工艺
%A Liu Xiuxi
%A Sun Ying
%A Li Yuguo
%A <br>刘秀喜
%A 孙瑛
%A 李玉国
%J 半导体学报
%D 2004
%I 
%X The research of open-tube double acceptor mixing technique is carried out to overcome the disadvantage of manufacturing high-voltage thyristor p type impurity diffusion technique.Through a great deal of experiments and technique argumentations,a kind of new technique of mixing gas (Ga)-solid (the mixed oxidation product of Al)-solid(Si) is developed.Proved by technique use,the mixing technique can distinctly improve the electrical parameters consistency,overall performance and qualified rate of device.The technique opens up a feasible double acceptor new technique for power semiconductor device research and production.
%K thyristor
%K acceptor impurity
%K doping mechanism
%K technology application<br>晶闸管
%K 受主杂质
%K 掺杂机制
%K 工艺应用
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=B23A1DBB3B3B2AD6&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=CA4FD0336C81A37A&sid=91C9056D8E8856E0&eid=DDD31293A7C7D057&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=4