%0 Journal Article
%T Design of a High Precision Array Pulse Sensor in TCM<br>中医用高精度阵列脉搏传感器的设计
%A Huai Yongjin
%A Han Zhengsheng
%A <br>淮永进
%A 韩郑生
%J 半导体学报
%D 2008
%I 
%X We designed a high-precision array pulse sensor for TCM (traditional Chinese medicine) that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology.We adopted a sacrifice-layer craft for the transistor gate.During testing,we found that the precision of the capacitor for the array sensor is 0.5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa.More importantly,the output-current and the pressure of the sensor have a good linearity and exponential characteristics.According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.
%K array senor
%K pulse senor
%K MOSFET gate
%K linearity<br>阵列传感器
%K 压力传感器
%K MOSFET栅
%K 线性度
%K array
%K senor
%K pulse
%K senor
%K MOSFET
%K gate
%K linearity
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5BC9CB246A73CF3AED74C7E4BFFEE7A0&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=E158A972A605785F&sid=80BBC722D530DB8D&eid=703F3C1B6594BA64&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=6