%0 Journal Article
%T Effect of Load Stiffness on the Output of Thermal Microactuators<br>负载刚度对电热微执行器输出性能的影响分析
%A Gao Jianzhong
%A Zhao Yulong
%A Jiang Zhuangde
%A Yang Jing
%A <br>高建忠
%A 赵玉龙
%A 蒋庄德
%A 杨静
%J 半导体学报
%D 2006
%I 
%X Due to the fact that micro-electromechanical systems (MEMS) based thermal microactuators and displacement amplification mechanisms are all compatible,the stiffness match between these two components is important to consider to achieve adequate output in the design phase.First,the effect of load stiffness on microactuators is theoretically analyzed.The finite element method (FEM) is then used to simulate the performance of both thermal actuators and compatible amplifiers.It is shown that the stiffness ratio between microactuators and compatible transmissions significantly influences the performance of the combined mechanism.Prototypes are fabricated on an SOI substrate with deep reaction ion etching (DRIE) technology and then are tested.Experimental results coincide well with the theoretical predictions.
%K micro-electromechanical systems
%K microactuators
%K compliant mechanisms
%K DRIE<br>微机电系统
%K 微执行器
%K 柔性机构
%K 深刻蚀
%K 负载刚度
%K 热微执行器
%K 输出性能
%K 影响分析
%K Microactuators
%K Thermal
%K Output
%K Stiffness
%K Load
%K 有限元分析
%K 测试结果
%K 加工
%K 硅隔离衬底
%K DRIE
%K 离子刻蚀技术
%K 反应
%K 深层
%K 因素
%K 器件性能
%K 组合
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=59FEBA437DA57C17&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=CA4FD0336C81A37A&sid=F1177A9DF1349B63&eid=ED01F5AE50BE09C0&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=20