%0 Journal Article %T The design and test of MEMS piezoresistive ultrasonic sensor arrays
MEMS压阻式超声传感器阵列的设计与测试 %A Lian Deqin %A He Changde %A Zhang Hui %A Yu Jiaqi %A Yuan Kejing %A Xue Chenyang %A
廉德钦 %A 何常德 %A 张慧 %A 于佳琪 %A 宛克敬 %A 薛晨阳 %J 半导体学报 %D 2013 %I %X The design, fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced. The consistency of the resonance frequency and the sensitivity of the array are tested. Moreover, we detect the directivity and the multi-target identification ability of the array. The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results. This paper analyzes this problem in detail and points out the direction of improvement. As for the directivity, the actual result is consistent with the theoretical one. The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72° when the distance between the sensor array and measured objects is 2 m. %K ultrasonic sensor %K piezoresistive %K integrated array %K multi-target identification
超声传感器 %K 压阻 %K 集成阵列 %K 多目标分辨 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4D6BB6A422263A45D6B916E659E3F51B&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=38B194292C032A66&sid=D82D9811DCB56895&eid=DF92D298D3FF1E6E&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=10