%0 Journal Article
%T Neural Network-Based Optimization of VLSI Wafer Fabrication<br>基于神经网络方法的半导体生产工艺优化
%A WANG Xiang
%A |dong
%A CHEN Yong
%A |mei
%A WANG Shou
%A |jue
%A <br>王向东
%A 陈咏梅
%A 王守觉
%A 石林初
%J 半导体学报
%D 2000
%I 
%X A neural\|based manufacturing process control system for semiconductor factories is presented. Wafer fabrication is a dynamic, nonlinear,multivariable and complex industrial process.A model based on feedforward neural networks(FNN) is proposed to simulate the wafer manufacturing process. Learning from the historical technological records with a special dynamic learning method, the neural\|based model can approximate the function relationship between the technological parameters and the wafer yield precisely. A gradientdescent method to search a set of optimal technological parameters is used in order to lead to the maximum yield by simulation. The wafer yield increases by 7\^63% after the optimal parameters were applied in the wafer fabrication assembly.
%K Manufacture of Semiconductor Devices
%K Optimization of Process
%K Neural Network<br>半导体生产
%K 工艺优化
%K 神经网络
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=79E10592CD35D51D&yid=9806D0D4EAA9BED3&vid=659D3B06EBF534A7&iid=0B39A22176CE99FB&sid=C29816B2656377A7&eid=E0F6F365E4766526&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9