%0 Journal Article
%T Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching<br>采用单步光刻和湿法腐蚀工艺制作高性能衍射微透镜
%A Zhang Xinyu
%A Chen Shengbin
%A Ji An
%A Xie Changsheng
%A <br>张新宇
%A 陈胜斌
%A 季安
%A 谢长生
%J 半导体学报
%D 2007
%I 
%X We discuss a low cost fabrication method of a diffractive microlens with high performance for both blue and red DVD objective lenses,which consists of single-step photolithography and a wet etching process.The surface roughness of the fabricated micro-optics structure is in the nanometer range;The feature height of the diffractive phase step is in the sub-micrometer range;And can be adjusted according to requirements;And the optical aperture of the microlens can be changed from millimeter to centimeter magnitude.A large number of basic phase structures in the diffractive microlens can be set and arranged by a diffractive integrating algorithm according to the appearance and feature parameters of the beam process.Far field optical measurement shows a high diffractive efficiency of the fabricated diffractive structure.
%K diffractive microlens with high performance
%K diffractive integrating algorithm
%K single step photolithography
%K wet etching technology
%K DVD object lens<br>高性能衍射微透镜
%K 衍射积分算法
%K 单步光刻
%K 湿法腐蚀工艺
%K DVD物镜
%K 单步
%K 光刻
%K 湿法腐蚀
%K 工艺制作
%K 高性能
%K 衍射微透镜
%K Wet
%K Etching
%K Photolithography
%K Single
%K Step
%K Diffractive
%K 显示
%K 光学测试
%K 远场
%K 排布
%K 灵活设置
%K 积分算法
%K 参数指标
%K 形貌特征
%K 出射光束
%K 结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5646F94D35B54F6F3016348A82A30B19&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=F3090AE9B60B7ED1&sid=D2F1C862439505C0&eid=3429B4C547F01F4E&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=7