%0 Journal Article
%T A Model for Mechanical Property Evaluation of the PeriodicPorous Low-k Materials by SAW<br>周期性多孔低介电常数材料机械特性的表面波测量模型
%A Li Zhiguo
%A Yao Suying
%A Xiao Xia
%A Bai Maosen
%A <br>李志国
%A 姚素英
%A 肖夏
%A 白茂森
%J 半导体学报
%D 2007
%I 
%X The influence of the distribution of nano-pores on the mechanical properties evaluation of porous low-k films by surface acoustic waves(SAW)is studied.A theoretical SAW propagation model is set up to characterize the periodic porous dielectrics by transversely isotropic symmetry.The theoretical deductions of SAW propagating in the low-k film/Si substrate layered structure are given in detail.The dispersive characteristics of SAW in different propagation directions and the effects of the Young's moduli E,E' and shear modulus G' of the films on these dispersive curves are found.Computational results show that E' and G' cannot be measured along the propagation direction that is perpendicular to the nano-pores' direction.
%K periodic porous materials
%K low-k dielectrics
%K transversely isotropic symmetry
%K mechanical property
%K SAW measurement<br>周期性多孔材料
%K 低介电常数介质
%K 横观各向同性对称
%K 机械特性
%K 表面波测量
%K periodic
%K porous
%K materials
%K low-k
%K dielectrics
%K transversely
%K isotropic
%K symmetry
%K mechanical
%K property
%K SAW
%K measurement
%K 周期性
%K 多孔
%K 低介电常数材料
%K 机械特性
%K 表面波
%K 测量模型
%K Materials
%K Porous
%K Periodic
%K Evaluation
%K Mechanical
%K Property
%K propagation
%K direction
%K Computational
%K results
%K show
%K curves
%K shear
%K modulus
%K moduli
%K dispersive
%K characteristics
%K different
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5646F94D35B54F6FFD60C4121A470DA1&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=708DD6B15D2464E8&sid=72C9FC6259F90AE2&eid=D2FD077E5EE423CA&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=23