%0 Journal Article
%T Pattern Fabrication on PLZT Films and Their Properties by a Direct Patterning Process<br>直接感光法制备锆钛酸铅镧薄膜图形及其性能
%A Zhang Weihu
%A Shi Chunmei
%A Yuan Yuan
%A Zhao Gaoyang
%A Sheng Shuyue
%A <br>张卫华
%A 石春梅
%A 袁媛
%A 赵高扬
%A 盛淑月
%J 半导体学报
%D 2008
%I 
%X The photosensitive Pb0.91La0.09(Zr0.65Ti0.35)O3(PLZT)precursor sols are prepared by a modified sol-gel process with benzoylacetone as chemical modification to form a coordination chelate structure of metal-salt with PVP as an addition agent for suppressing film cracks.The patterns of PLZT gel films are prepared by direct patterning process and single dip-coating,and the PLZT film patterns with perovskite structure on Pt/TiO2/SiO2/Si substrate are obtained after heat-treatment.The PLZT film's pattern thickne...
%K PLZT films
%K sol-gel
%K fine-patterning
%K photosensitivity<br>锆钛酸铅镧薄膜
%K 溶胶凝胶
%K 微细图形
%K 感光性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=8AC0FCC62D5DE610FAC77A9585EFEB01&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=B31275AF3241DB2D&sid=53A4507B400B4E65&eid=8339CA1DD1F3C6AB&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=10