%0 Journal Article
%T Nanoindentation on the doubler plane of KDP single crystal<br>KDP晶体二倍频晶面纳米压痕实验研究
%A Guo Xiaoguang
%A Zhang Xiaoji
%A Tang Xianzhao
%A Guo Dongming
%A Gao Hang
%A Teng Xiaoji
%A <br>郭晓光
%A 张小冀
%A 唐宪钊
%A 郭东明
%A 高航
%A 滕晓辑
%J 半导体学报
%D 2013
%I 
%X The nanohardness is from 1.44 to 2.61 GPa, the Vickers hardness is from 127 to 252 Vickers, and elastic modulus is from 52 to 123 GPa by the nanoindentation experiments on the doubler plane of KDP crystal. An indentation size effect is observed on the doubler plane in the test as the nanohardness and elastic modulus decreases with the increase of the maximum load. Slippage is identified as the major mode of plastic deformation, and pop-in events are attributed to the initiation of slippage. And the variation of unloading curve end is the result of stick effects between the indenter and the contact surface. The depth of the elastic deformation, which is between 40 and 75 nm, is responsible for the elastic deformation. The doubler plane of KDP crystal has anisotropy, and the relative anisotropy of nanohardness is 8.2% and the relative anisotropy of elastic modulus is 8.0%.
%K KDP crystal
%K the doubler plane
%K nanoindentation
%K size effect
%K anisotropy<br>KDP晶体
%K 二倍频晶面
%K 纳米压痕
%K 尺寸效应
%K 各向异性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4D6BB6A422263A450ACFB2A1E5B88BE6&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=38B194292C032A66&sid=1E592E74A194E772&eid=94C357A881DFC066&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=7