%0 Journal Article
%T 用射频偏压溅射制备的具有快速紫外光响应的ZnO薄膜
%A 张德恒
%J 半导体学报
%D 1995
%I 
%X 用射频偏压溅射在较高氧压下沉积的六角密排结构的Ｃ轴平行于衬底的混合晶向结构的多晶ＺｎＯ薄膜，对紫外光的照射有较快的光响应．在此ＺｎＯ膜上再沉积层氮掺杂的ＺｎＯ膜，可使其光响应得以大大改善．
%K 氧化锌薄膜
%K 射频偏压溅射
%K 紧外光响应
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=315B38686319CC39&yid=BBCD5003575B2B5F&vid=7801E6FC5AE9020C&iid=F3090AE9B60B7ED1&sid=EEAFC972BAD75B1F&eid=B75DC817262E20A8&journal_id=1674-4926&journal_name=半导体学报&referenced_num=6&reference_num=3