%0 Journal Article
%T Mathematical Morphology Based Algorithm to Measure Quantum Dots from AFM Photos
量子点的原子力显微镜测试结果分析:数学形态学的实现
%A Jin Feng
%A Lu Huaxiang
%A Li Kai
%A Chen Yonghai
%A Wang Zhanguo
%A
金峰
%A 鲁华祥
%A 李 凯
%A 陈涌海
%A 王占国
%J 半导体学报
%D 2005
%I
%X This paper proposes an algorithm to obtain the statistic data of quantum dots from atomic force microscopy photos.Starting from identifying the dynamic values of each regional maximum,the peak of each qualified quantum dot is located.Their positions are used as the markers for the next step, which is to apply the marker watershed transform to obtain a rough segmentation of the quantum dots.According to the boundary of the coarse partition,each quantum dot is cut from the original photo.A process is then carried out to filter the possible attached substrates based on the area-height distribution of the current quantum dot.After all the above stages,all the quantum dots can be accurately and robustly extracted and thus their properties, such as height,lateral size,and volume,can easily be measured.
%K mathematical morphology
%K watershed transform
%K quantum dots characterization
%K automatic statistics
数学形态学
%K 分水岭变换
%K 量子点检测
%K 自动统计
%K 量子点
%K 原子力
%K 显微镜
%K 测试
%K 结果分析
%K 数学形态学
%K Quantum
%K Dots
%K Measure
%K Algorithm
%K Based
%K Morphology
%K 体积
%K 尺寸
%K 敏感
%K 噪声
%K 快速
%K 分布
%K 面积
%K 高度
%K 过程
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=7F29E2DAD9B0933A&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=708DD6B15D2464E8&sid=8D601B5F3948DDF6&eid=6205636A05F6FF86&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=15