%0 Journal Article
%T A CMOS Integrated Flow Sensor with Output Modulated by Pulse-Width<br>具有脉宽调制输出的CMOS集成流量传感器
%A Huang Jinbiao/Microelectronics Censer
%A South-East University
%A Nanjing Tong Qinyi/Microelectronics Censer
%A South-East University
%A Nanjing
%A <br>黄金彪
%A 童勤义
%J 半导体学报
%D 1990
%I 
%X A CMOS integrated flow sensor with digital output has been introduced. The sensor consistsof a temperature sensing stage, a heating stage and a Schmitt trigger. The circuits are connectedto make the sensor work at the oscillation state of heating and cooling, producing a squarewave output.The pulse width of the square wave is used as a measure of flow velocity. Thesensor is fabricated by the conventional CMOS process.
%K Sensors
%K Integrated flow sensors
%K Digital output<br>集成流量
%K 传感器
%K CMOS
%K 数字化输出
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=F3037EA8CAEDE402&yid=8D39DA2CB9F38FD0&vid=708DD6B15D2464E8&iid=94C357A881DFC066&sid=87545994EC2C1F12&eid=EE23223CE4332BD7&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=1