%0 Journal Article
%T Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate
%A Yang Hu
%A Zhu Hongliang
%A Xie Hongyun
%A Zhao Lingjuan
%A Zhou Fan
%A Wang Wei
%A <br>Yang Hu
%A Zhu Hongliang
%A Xie Hongyun
%A Zhao Lingjuan
%A Zhou Fan
%A Wang Wei
%J 半导体学报
%D 2006
%I 
%X 分别在普通的低阻硅衬底、带有3μm厚氧化硅介质层的低阻硅衬底和高阻硅衬底上设计并制备了微波传输共面波导.结果表明,低阻硅衬底导致过高的微波损耗从而不能使用,通过加氧化硅介质层,微波损耗可以大大减少,但是需要较厚的氧化硅厚度.直接制备在高阻硅衬底上的共面波导在所测试的26GHz的频率范围内获得低于2dB/cm的微波损耗,而且工艺十分简单.
%K coplanar waveguides
%K high-resistivity silicon
%K microwave loss
%K high frequency
%K optoelectronic packaging<br>共面波导
%K 高阻硅
%K 微波损耗
%K 高频
%K 光电子封装
%K coplanar
%K waveguides
%K high-resistivity
%K silicon
%K microwave
%K loss
%K high
%K frequency
%K optoelectronic
%K packaging
%K 高阻
%K 硅衬底
%K 微波损耗
%K 共面波导
%K Silicon
%K Substrate
%K Coplanar
%K Waveguides
%K process
%K simple
%K range
%K microwave
%K loss
%K lower
%K transmission
%K lines
%K results
%K show
%K high
%K used
%K substrates
%K silicon
%K oxide
%K interlayer
%K different
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5F479925C34B1E5E&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=CA4FD0336C81A37A&sid=CA4FD0336C81A37A&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=8