%0 Journal Article
%T Effect of Trapped Charges on GMLM Pull-Out Voltage<br>陷阱电荷对GMLM工作电压的影响
%A Zhang Jie
%A Huang Shanglian
%A Sun Jiyong
%A Zhang Zhihai
%A Zhu Yong
%A <br>张洁
%A 黄尚廉
%A 孙吉勇
%A 张智海
%A 朱永
%J 半导体学报
%D 2008
%I 
%X A grating moving light modulator (GMLM) modulates light energy by changing the distance of the movable grating and the underlying fixed reflector.The dielectric material SiO2 provides trap sites for charges both in the volume and the surface in high electric field,which will affect GMLM driving characteristic.With Gauss theory,the electrodynamic model is set up.The distribution of trapped charges and the relationship between the displacement of movable grating and applied voltage are analyzed in detail An experimental scheme is designed.The experiment indicates that increasing the applied voltage achieves the same displacement due to the influence of trapped charges,a longer charge time,and a bigger offset voltage,which is consistent with theoretical analysis.
%K grating
%K trapped charges
%K pull-out voltage<br>光栅
%K 陷阱电荷
%K 工作电压
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=70FD09C897F4E15DD8E8478B726258D9&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=DF92D298D3FF1E6E&sid=CB8F7B3BEDA8D32B&eid=83525804D8B40525&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12