%0 Journal Article
%T Growth of Zn1-xMgxO Films by Pulsed Laser Deposition<br>脉冲激光沉积法生长Zn_(1-x)Mg_xO薄膜
%A Zou Lu
%A Ye Zhizhen
%A Huang Jingyun
%A Zhao Binghui
%A <br>邹璐
%A 叶志镇
%A 黄靖云
%A 赵炳辉
%J 半导体学报
%D 2002
%I 
%X 采用脉冲激光沉积法 ,生长出没有组分偏析 ,晶体质量好的 Zn1 - x Mgx O薄膜 (x=0 .2 ) .研究了衬底温度对Zn0 .8Mg0 .2 O薄膜晶体质量、晶粒度大小的影响 ,发现最佳衬底温度为 6 5 0℃左右 .对 Zn0 .8Mg0 .2 O薄膜进行了光致发光分析 ,发现相对 Zn O晶体有 0 .4 e V的蓝移
%K Zn
%K 1-x
%K Mg
%K x
%K O thin film
%K alloy
%K X
%K ray diffraction
%K PL spectrum<br>Zn1-xMgxO薄膜
%K 合金
%K X射线衍射
%K PL谱
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=A6A518B451A34B68&yid=C3ACC247184A22C1&vid=EA389574707BDED3&iid=59906B3B2830C2C5&sid=0E37D9F9BC838B8F&eid=5A700C739C4FF128&journal_id=1674-4926&journal_name=半导体学报&referenced_num=6&reference_num=11