%0 Journal Article
%T A Solenoid-Type Inductor Fabricated by MEMS Technique
%A Gao Xiaoyu
%A Zhou Yong
%A Wang Xining
%A LEI Chong
%A Chen Ji''''an
%A Zhao Xiaolin
%A <br>Gao Xiaoyu
%A Zhou Yong
%A Wang Xining
%A Lei Chong
%A Chen Ji’an
%A and Zhao Xiaolin
%J 半导体学报
%D 2005
%I 
%X A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q factor,UV-LIGA,dry etching technique,fine polishing and electroplating technique are adopted.The dimensions of the inductor are 1500μm×900μm×70μm,having 41 turns with a coil width of 20μm separated by 20μm spaces and a high aspect ratio of 3.5∶1.The maximum measured inductance of the inductor is 6.17nH with a Q factor of about 6.
%K inductance value
%K microelectromechanical systems
%K quality factor<br>inductance
%K value
%K microelectromechanical
%K systems
%K quality
%K factor
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=81163A5324CB9BD1&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=B31275AF3241DB2D&sid=74253B3A525E9002&eid=3395C64999261B75&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=8