%0 Journal Article
%T 980nm Oxide-Confined Vertical Cavity Surface Emitting Laser<br>980nm氧化物限制的垂直腔面发射激光器(英文)
%A Qu Hongwei
%A Guo Xia
%A Huang Jing
%A Dong Limin
%A LIAN Peng
%A Deng Jun
%A Zhu Wenjun
%A ZOU Deshu
%A Shen Guangdi
%A <br>渠红伟
%A 郭霞
%A 黄静
%A 董立闽
%A 廉鹏
%A 邓军
%A 朱文军
%A 邹德恕
%A 沈光地
%J 半导体学报
%D 2004
%I 
%X Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.
%K VCSEL
%K oxide-aperture
%K self-aligning process<br>垂直腔面发射激光器
%K 氧化孔径
%K 自对准工艺
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5607C829A750621E&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=38B194292C032A66&sid=30897FA31CA3354D&eid=FDC7AF55F77D8CD4&journal_id=1674-4926&journal_name=半导体学报&referenced_num=3&reference_num=9