%0 Journal Article
%T A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure
%A Wu Wengang
%A Chen Qinghu
%A Yin Dongqing
%A Yan Guizhen
%A Chen Zhangyuan
%A Hao Yilong
%A and Xu Anshi
%J 半导体学报
%D 2005
%I 
%X A novel into-plane rotating micromirror actuated by a hybrid electrostatic driving structure is presented.The hybrid driving structure is made up of a planar plate drive and a vertical comb drive.The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process.As demonstrated by experiment,the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90. rotation induced by the pull-in effect.The continuous rotating range of the micromirror is increased to about 46 degree at an increased yielding voltage.The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390～410V and 140～160V,respectively.The optical insertion loss has also been measured to be -1.98dB when the mirror serves as an optical switch.
%K micromirror
%K hybrid
%K electrostatic
%K driving
%K structure
%K planar
%K plate
%K drive
%K vertical
%K comb
%K drive
%K mixed
%K silicon
%K micromachining
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=83EC0D64C8AFD524F77DD8978EAD8530&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=9CF7A0430CBB2DFD&sid=0D4B5ACF7B6A1D2C&eid=030782B6ACCD7BEA&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0