%0 Journal Article
%T Design and Fabrication of Torsion Beam Actuator Based on Slanted Low Electrode<br>具有倾斜下电极的扭臂驱动结构的设计与制作
%A Dong Wei
%A Ruan Shengping
%A Zhang Xindong
%A Liu Caixia
%A Jia Cuiping
%A Pan Jianxuan
%A Zhang Long
%A Sun Dongming
%A Ji Ping
%A Chen Weiyou
%A <br>董玮
%A 阮圣平
%A 张歆东
%A 刘彩霞
%A 贾翠萍
%A 潘建旋
%A 张龙
%A 孙东明
%A 纪平
%A 陈维友
%J 半导体学报
%D 2003
%I 
%X The relation between the applied voltage and the displacement at the end of upper electrode is studied.The actuator with the slanted low electrode is proposed and fabricated with certain tilting angle (111) silicon.Theoretical analysis and experiment results indicate that the pull in voltage based on the slanted low electrode actuator is half of that based on the flat low electrode.
%K micromechanics
%K optical switches
%K torsion beam
%K slanted low electrode<br>微机械
%K 光开关
%K 扭臂
%K 倾斜下电极
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=B6342F61FDC0424F&yid=D43C4A19B2EE3C0A&vid=B91E8C6D6FE990DB&iid=708DD6B15D2464E8&sid=D7FC8AF637611368&eid=2625CEFACC964DE3&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=10