%0 Journal Article
%T SOI-Based 3dB MMI Splitter<br>SOI- Based 3dB MMI Splitter
%A WEI Hong-zhen
%A YU Jin-zhong
%A LIU Zhong-li
%A ZHANG Xiao-feng
%A SHI Wei
%A FANG Chang-shui
%A <br>魏红振
%A 余金中
%A 刘忠立
%A 张晓峰
%A 史伟
%A 房昌水
%J 半导体学报
%D 2000
%I 
%X A type of SOI based MMI 3dB splitter has been demonstrated. The geometry was analyzed and designed by effective index method and guide mode method. The fabrication tolerance was analyzed too. The device was fabricated and near field output was obtained. The device shows large width tolerance, low loss and low power uniformity.
%K SOI
%K multimode interference
%K integrated optics<br>MMI
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4CCF60FC28389455&yid=9806D0D4EAA9BED3&vid=659D3B06EBF534A7&iid=708DD6B15D2464E8&sid=309A221A57FE8496&eid=A326383D2F3B3AB0&journal_id=1674-4926&journal_name=半导体学报&referenced_num=4&reference_num=7