%0 Journal Article
%T Bulk-Silicon Resonant Accelerometer
%A Jia Yubin
%A Hao Yilong
%A Zhang Rong
%A <br>Jia Yubin
%A Hao Yilong
%A and Zhang Rong
%J 半导体学报
%D 2005
%I 
%X Resonant accelerometer is designed,which includes two doubleended tuning forks,a proof mass,fourleverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27.3Hz/g,and the resolution is 167.8μｇ.
%K MEMS accelerometer
%K resonant driving and sensing
%K bulk-silicon process
%K frequency shift<br>MEMS加速度计
%K 谐振激励和敏感
%K 体硅工艺
%K 频率漂移
%K MEMS
%K accelerometer
%K resonant
%K driving
%K and
%K sensing
%K bulk-silicon
%K process
%K frequency
%K shift
%K 体硅
%K 谐振
%K 加速度计
%K Accelerometer
%K resolution
%K sensitive
%K degree
%K device
%K technology
%K tuning
%K fork
%K resonance
%K sense
%K drive
%K system
%K inertial
%K force
%K proof
%K mass
%K Resonant
%K accelerometer
%K 分辨率
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=534C46D9EDC7986C&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=0B39A22176CE99FB&sid=C1B34927D429E92F&eid=11CEECA6DA9E4AC5&journal_id=1674-4926&journal_name=半导体学报&referenced_num=6&reference_num=13