%0 Journal Article
%T Stress Analysis of Silica Optical Waveguide on Silicon by a Finite Element Method<br>硅基二氧化硅波导的应力和偏振相关性的数值分析
%A Deng Xiaoqing
%A Yang Qinqing
%A Wang Hongjie
%A Hu Xiongwei
%A Wang Qiming
%A <br>邓晓清
%A 杨沁清
%A 王红杰
%A 胡雄伟
%A 王启明
%J 半导体学报
%D 2002
%I 
%X Stress distribution in silicon based silica optical waveguide is calculated by using a finite element method.The waveguide is mainly subjected to compress stress along lateral direction,and the stress is accumulated near the interface between the core and the cladding layers.With the stress distribution,the mode index is calculated by the finite difference solution for the full vector waveguide equation based upon the alternating direction implicit (ADI) iterative method.The birefringence of the waveguide is mainly the stress induced birefringence,and the mode index is larger than that without considering the stress effect.
%K finite element method
%K stress
%K silica optical waveguide on silicon
%K birefringence<br>有限元
%K 应力
%K 硅基二氧化硅波导
%K 双折射效应
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=C8D679009736C1E8&yid=C3ACC247184A22C1&vid=EA389574707BDED3&iid=708DD6B15D2464E8&sid=D7FC8AF637611368&eid=A0F0DDA3F8BC378D&journal_id=1674-4926&journal_name=半导体学报&referenced_num=9&reference_num=11