%0 Journal Article
%T Mach-Zehnder Electro-Optic Polymer Modulator with Corona Poled Core Layer<br>Mach-Zehnder型有机极化聚合物电光调制器(英文)
%A YANG Xiao-hong
%A DU Yun
%A SHI Zhi-wen
%A WU Rong-han
%A <br>杨晓红
%A 杜云
%A 石志文
%A 吴荣汉
%J 半导体学报
%D 2001
%I 
%X A Mach-Zehnder(MZ) electro-optic(EO) modulator are real iz ed,with three optical layers as polymer materials.The functional layer is the co rona poled crosslinkable polyurethane.The ridge waveguide is fabricated by using the spin-coating,poling,photolithography and oxygen reactive ion etching(RIE) techniques.The mode and the modulation properties of these devices are demonstra ted in a micron control system,while the light source works at the wavelength of 1 31 or 1 55 micron.
%K poled polymer
%K M Z waveguide
%K electro-optic modulator<br>极化聚合物
%K MZ波导
%K 电光调制器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=E40FC9B6F7528612&yid=14E7EF987E4155E6&vid=BC12EA701C895178&iid=5D311CA918CA9A03&sid=E151839C3C081609&eid=3A9B6DFDAB34D091&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=6