%0 Journal Article
%T Synthesis of One-Dimensional ZnO Nanorods by Oxidating Zinc Films Deposited with Magnetron Sputtering<br>热氧化磁控溅射金属锌膜合成一维ZnO纳米棒(英文)
%A Shi Liwei
%A Li Yuguo
%A Wang Qiang
%A Xue Chengshan
%A Wang Shuyun
%A <br>石礼伟
%A 李玉国
%A 王强
%A 薛成山
%A 王书运
%J 半导体学报
%D 2004
%I 
%X One-dimensional ZnO nanorods are synthesized by ox idating thin metal zinc films deposited on Si(111) substrates with radio frequen cy magnetron sputtering.The crystal structure,surface morphology,and optical pro perties of nanorods are investigated.X-ray diffraction(XRD) pattern,scanning el ectron microscopy(SEM),and transmission electron microscopy(TEM) analyses show t hat the synthesized single-crystal ZnO nanorods develop like hairpins along dif ferent radials,with a hexagonal wurtzite structure.The diameters of nanorods ran ge between 30 and 60nm and lengths up to micrometers.Photoluminescence(PL) analy sis shows that,under 280nm light excitation,a strong and sharp near band-edge U V light emission band at 372nm and a relatively weak green deep-level light emi ssion band at 516nm are observed from the ZnO nanorods,which indicates excellent crystallization and optical quality of the fabricated ZnO nanorods.
%K magnetron sputtering
%K thermal oxidation
%K ZnO
%K nan orods
%K properties<br>磁控溅射
%K 热氧化
%K 氧化锌
%K 纳米棒
%K 特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=54E516DF9B767DDE&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=F3090AE9B60B7ED1&sid=C4B40BDE3E33484C&eid=4BE5C218638B5C80&journal_id=1674-4926&journal_name=半导体学报&referenced_num=5&reference_num=9