%0 Journal Article
%T A Novel Humidity Sensor Compatible with CMOS Technology<br>一种新型CMOS兼容湿度传感器
%A Gu Lei
%A Huang Qing''''an
%A Qin Ming
%A Zhang Zhongping
%A Yan Xianwei
%A <br>顾磊
%A 黄庆安
%A 秦明
%A 张中平
%A 严先蔚
%J 半导体学报
%D 2004
%I 
%X A new comb structure of capacitive humidity sensor is described,which is fabricated by a standard CMOS process to achieve an effective solution for accurate and reliable humidity measurement.The structure is analyzed by using the Coventor softwave.The capacitance of RH sensor is measured and the processes of absorption and desorption are compared clearly.The measured results show that the hysteresis,repeated property,and the sensitivity of the sensor can be precisely calibrated.The result indicates also that the novel humidity sensor may be applied in practice.
%K humidity sensor
%K MEMS
%K CMOS
%K integrated sensor<br>湿度传感器
%K 微电子机械系统
%K CMOS
%K MEMS
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=47C567386EA0B6A8&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=0B39A22176CE99FB&sid=0584DB487B4581F4&eid=4609832E4B5C797B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=3&reference_num=8