%0 Journal Article
%T A Generalized Reynolds'''' Equation For Squeeze-Film Air Damping in MEMS<br>微电子机械器件压膜空气阻尼的一般化雷诺方程(英文)
%A Bao Minhang
%A Sun Yuancheng
%A Yang Heng
%A Wang Yuelin
%A <br>鲍敏杭
%A 孙远程
%A 杨恒
%A 王跃林
%J 半导体学报
%D 2002
%I 
%X A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is developed.For perforated plate,the thickness and the dimensions of the plate are not limited.With boundary conditions,pressure distribution and the damping force on the plate can be found by solving the differential equation.Analytical expressions for damping pressure and damping force of a long strip holeplate are presented with a finite thickness and a finite width.To the extreme conditions of very thin plate and very thin hole,the results are reduced to the corresponding results of the conventional Reynolds' equation.Thus, the effectiveness of the generalized differential equation is justified.Therefore,the generalized Reynolds' equation will be a useful tool of design for damping structures in MEMS.
%K squeeze
%K film air damping
%K MEMS
%K Reynolds' equation<br>压膜空气阻尼
%K 微电子机械器件
%K 雷诺方程
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=52D9EF309D4C7220&yid=C3ACC247184A22C1&vid=EA389574707BDED3&iid=59906B3B2830C2C5&sid=076A4355FDA11BCF&eid=ED8B09838922B3F8&journal_id=1674-4926&journal_name=半导体学报&referenced_num=2&reference_num=5