%0 Journal Article
%T A Novel Lateral Solenoidal On-Chip Integrated Inductor Implemented in Conventional Si Process<br>新颖的常规硅工艺实现的侧向螺线型片上集成电感(英文)
%A Liu Chang
%A Chen Xueliang
%A Yan Jinlongand Gu Weidong
%A <br>刘畅
%A 陈学良
%A 严金龙
%A 顾伟东
%J 半导体学报
%D 2002
%I 
%X A new structure of the on- chip integrated inductors im plem ented in conventional Si process is presented as a lateral solenoid.The fabrication process utilizes a conventional Si technology with standard double- layer m etal- lization.S param eters of the inductors based equivalent circuit are investigated and the inductor parameters are cal- culated from the m easured data.Experimental results are presented on an integrated inductors fabricated in a lateral solenoid type utilizing double m etal layers rather than a single metal layer as used in conventional planar spiral de- vices.Inductors with peak Q of 1.3and inductance value of 2 .2 n H are presented,which are com parable to conven- tional planar spiral inductors.
%K integrated inductor
%K solenoidal inductor
%K spiral inductor
%K quality factor<br>集成电感
%K 螺线电感
%K 螺旋电感
%K 品质因素
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=CC3B0C592DCE7158&yid=C3ACC247184A22C1&vid=EA389574707BDED3&iid=E158A972A605785F&sid=EA64BD0B2FF6E786&eid=35E8A259891FB32F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=3&reference_num=0