%0 Journal Article
%T Dynamic Behaviour of Miniature Microphone with Corrugated Membrane:Top-down Design with EDA/CAD<br>纹膜结构微麦克风的动态特性:使用EDA/CAD工具进行Top-down设计
%A 陈兢
%A 刘理天
%A 李志坚
%J 半导体学报
%D 2001
%I 
%X The optimization of a fabricated miniature microphone is presented by collecting the electrical network simulator PSPICE and the FEA(Finite Element Analysis)program ANSYS.After the simulation of the dynamic behaviour of miniature microphone with corrugated membrane by using EDA/CAD tools,optimal values of the related parameters are obtained.The optimized miniature microphone shows a flat frequency response in the audio frequency.The top down approach is also introduced to analyse the behaviour of the complex system and the interactions between different components in the design process.
%K MEMS
%K CAD
%K dynamic
%K behaviour
%K miniature
%K microphone
%K corrugated
%K membrance<br>MEMS
%K CAD
%K 动态特性
%K 微麦克风
%K 纹膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=9874F692373CC60F&yid=14E7EF987E4155E6&vid=BC12EA701C895178&iid=DF92D298D3FF1E6E&sid=9822743C2D2BE348&eid=7A7A8B1000B9FF84&journal_id=1674-4926&journal_name=半导体学报&referenced_num=5&reference_num=9