%0 Journal Article
%T Effect of Film Thickness on Crystal Growth and Optical Properties of FeS2 Thin Films<br>FeS_2薄膜厚度对晶体生长及光吸收特性的作用
%A Zhang Xiujuan
%A Meng Liang
%A Liu Yanhui
%A <br>张秀娟
%A 孟亮
%A 刘艳辉
%J 半导体学报
%D 2004
%I 
%X The FeS 2 films with different thickness are prepared by sulfur-annealing the Fe films deposited on single-crystal silicon substrates by magnetron sputtering.The behaviors of crystal growth and optical absorption are determined.The distributed proportion of the crystalline orientation shows certain alteration with increasing in film thickness.The grain size increases but the lattice constant decreases with increasing in film thickness up to 330nm.However,the grain size decreases but the lattice constant increases as film thickness is over 330nm.Both the optical absorption coefficient and bandgap decrease with increasing in film thickness.The changes of phase transformation stress,specific surface area,and crystal defect density with film thickness can be considered to be generally responsible for the behaviors of crystal growth and optical properties.
%K pyrite
%K thin film
%K crystal structure
%K optical property<br>FeS2
%K 薄膜
%K 晶体结构
%K 光学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=55D99D40B1914CD0&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=E934BC2766053B28&eid=8DDBA6455F2E3ECF&journal_id=1674-4926&journal_name=半导体学报&referenced_num=2&reference_num=12