%0 Journal Article %T 硅中铁对氧碳沉淀的影响 %A 张一心 %J 半导体学报 %D 1987 %I %X 本文研究了铁对氧碳沉淀的影响.对于高碳单晶,碳沉淀减少,氧沉淀减慢;对于低碳单晶、氧沉淀增加. %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=E368A61217CEC987440D63B82834F6A9&yid=9C2DB0A0D5ABE6F8&vid=5D311CA918CA9A03&iid=38B194292C032A66&sid=B1E36BF7B9783A85&eid=8ED630AD8C61FAE8&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=0