%0 Journal Article
%T Thermodynamic Study of Vapor Phase Epitaxy of In_xGa_(1-x)As Using An In-Ga Alloy Source<br>In-Ga合金源汽相外延生长In_xGa_(1-x)As体系的热力学分析
%A Xu Baokun/Jilin University
%A Changchun
%A ChinaLi Zhonghua/Jilin University
%A Changchun
%A ChinaSong Lizhu/Jilin University
%A Changchun
%A ChinaZhao Muyu/Jilin University
%A Changchun
%A China
%A <br>徐宝琨
%A 李钟华
%A 宋利珠
%A 赵慕愚
%J 半导体学报
%D 1989
%I 
%X The vapor phase epitaxy of In_xGa_(1-x)As using an In-Ga alloy source has been studiedthermodynamically.Some useful conclusions for the technology have been obtained from thecalculations.
%K Thermodynamic calculation
%K Vapor phase epitaxy
%K Indium gallium arsenide solid solution<br>热力学计算
%K 气相外延
%K 铟镓砷
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=71FE90CD1688F3075ABC0068E3FD0406&yid=1833A6AA51F779C1&vid=F3090AE9B60B7ED1&iid=E158A972A605785F&sid=DFEE4E8C33C95CEF&eid=51C74DF6A16DA45B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=3