%0 Journal Article
%T Al-Si欧姆接触的连续CO_2激光辐照合金化
%A 陈存礼
%A 范仁永
%J 半导体学报
%D 1983
%I 
%X 本文报道了用连续CO_2激光辐照代替热合金化做Al-Si欧姆接触.由于激光退火具有瞬时退火的特点,避免或是明显地减少导致残结器件失效的Al-Si互扩散现象,从而达到保持良好结特性的欧姆接触.为提高大规模集成电路的集成度提供了一条途径.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=923EDDC4071A1DBF1C0FBA00D2A27A8F&yid=A7F20A391020FDEE&vid=E158A972A605785F&iid=94C357A881DFC066&sid=51F9E747BA1ACB45&eid=60E9AACF61B3107F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0