%0 Journal Article
%T Pt/Si和Pd/Si肖特基接触的XPS研究
%A 戴道宣
%A 鲍敏杭
%A 田曾举
%A 姜国宝
%J 半导体学报
%D 1984
%I 
%X 用XPS测量了Pt/Si和Pd/Si 肖特基接触界面处的芯态谱和价带谱.界面处有硅化物M_2Si存在,对界面处金属芯态谱随光电子发射角变化的反常现象作了初步探讨.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=D58ED9DF2D08792C&yid=36250D1D6BDC99BD&vid=94C357A881DFC066&iid=38B194292C032A66&sid=EC34D52BE81085CE&eid=160561E9A96393DE&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0