%0 Journal Article
%T An Improved AFM Dynamic Imaging Method Based on Data Fusion of Neighboring Point Set<br>一种基于临近点集数据融合的AFM动态成像方法
%A DONG Xiao-Kun
%A FANG Yong-Chun
%A ZHANG Yu-Dong
%A <br>董晓坤
%A 方勇纯
%A 张玉东
%J 自动化学报
%D 2011
%I 
%X The atomic force microscopy (AFM) is an important tool in the field of nanotechnology and nanomanipulation. Based on the filtering and data fusion methods, this paper proposes an innovative imaging method to enhance the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized by commercial AFMs, then presents an improved dynamic imaging method based on data fusion of neighboring point set to deal with the large imaging error along the Z direction due to the AFM nonlinear characteristics when scanning a highly coarse surface or scanning with a high speed. Finally, some simulation and experimental results are included to demonstrate the superior performance of the proposed imaging method.
%K Atomic force microscopy (AFM)
%K imaging technology
%K data fusion
%K filtering technology
%K dynamics<br>原子力显微镜
%K 扫描成像技术
%K 数据融合
%K 滤波技术
%K 动态特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=8240383F08CE46C8B05036380D75B607&jid=E76622685B64B2AA896A7F777B64EB3A&aid=522118A168835769A5AF0063D8DBC67B&yid=9377ED8094509821&vid=42425781F0B1C26E&iid=0B39A22176CE99FB&sid=797D49279EA93BC4&eid=78F0EFE028BD3783&journal_id=0254-4156&journal_name=自动化学报&referenced_num=0&reference_num=0