%0 Journal Article
%T Neural Network-Based Optimization of Vlsi Wafer Fabrication<br>基于神经网络的集成电路生产过程建模与优化
%A WANG Xiang-Dong
%A CHEN Yong-Mei
%A WANG Shou-Jue
%A SHI Lin-Chu
%A <br>王向东
%A 陈咏梅
%A 王守觉
%A 石林初
%J 自动化学报
%D 2001
%I 
%X In this paper, we present a neural based manufacturing process control system to improve the lot yield of wafer fab. The process is as follows: 1. A model based on feedforward neural networks is proposed to simulate the wafer manufacturing process. Learning from the historical technological records with a special dynamic learning method, the neural based model can approximate the function relationship between the technological parameters and the wafer yield precisely. 2. We also use a gradient descent method to search a set of optimal technological parameters that lead to the maximum yield by simulation. 3. We optimize the specifications of the wafer fab according to the optimal parameters. The wafer yield increases by 11 2% after the optimized specifications are applied to the wafer fabrication assembly.
%K Neural networks
%K wafer fabrication
%K process capability index
%K yield enhancement<br>集成电路
%K 生产过程
%K 建模
%K 优化
%K 神经网络
%K 半导体芯片
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=8240383F08CE46C8B05036380D75B607&jid=E76622685B64B2AA896A7F777B64EB3A&aid=DD635270E7CA7A18&yid=14E7EF987E4155E6&vid=DB817633AA4F79B9&iid=38B194292C032A66&sid=F50A8B5513721E1C&eid=AF507FDD66D991DA&journal_id=0254-4156&journal_name=自动化学报&referenced_num=0&reference_num=6