%0 Journal Article
%T Study on the Texture of AIN Thin Films by Using the Pole-figure Method<br>氮化铝薄膜织构的极图法研究
%A XU Xiao-Hong
%A WU Hai-Shun
%A MA Wen-Jin
%A DUAN Jing-Fang
%A LI Zuo-Yi
%A <br>许小红
%A 武海顺
%A 马文瑾
%A 段静芳
%A 李佐宜
%J 无机材料学报
%D 2003
%I Science Press
%X Based on the X-ray diffraction results, the textures of aluminium nitride films were investigated by using the pole-figure method. Aluminium nitride thin films prepared have a high (002) plane texture, and most of the c-axis of particles are parallel with the normal of the substrate. Aluminium nitride thin films with (100) orientation are necessary, as they are applied to surface acoustic wave devices, and the pole-figure results are very useful for determining the c-axis of particles direction in the A1N (100) thin films.
%K aluminium nitride thin films
%K pole-figure method
%K texture<br>氮化铝薄膜
%K 极图
%K 织构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=997E8AD0C77870BD&yid=D43C4A19B2EE3C0A&vid=13553B2D12F347E8&iid=0B39A22176CE99FB&sid=D397660E39E3E461&eid=3F419E61BD389CC8&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=2&reference_num=14