%0 Journal Article
%T Assessment of Nano-Scratch Resistance of Diamond-Like Carbon Films<br>类金刚石薄膜的表面纳米划擦性能评价
%A HUANG Li-Ye
%A XU Ke-Wei
%A LU Jian
%A <br>黄立业
%A 徐可为
%A 吕坚
%J 无机材料学报
%D 2001
%I Science Press
%X Diamond-like carbon (DLC) films were prepared on Ti alloy substrate with an rf- plasma enhanced chemical vapor deposition method (rf PECVD), their nano-mechanical properties were evaluated by using a Nano Indenter system with attachments of Continues Stiffoess Measure- ment (CSM) and lateral force measurement (LFM). The results show that the hardness of those films increases with film thickness, but their increment is small; during scratching, three processes containing fully elastic recovery, asynchronous recovery of films and substrate, and delaminating of films, successively occur as the increase of load; at the first regime, no damage could be found on the surface of films, in the second regime, the trace like fish bone formed; as the thickness of films increases, the critical load increases, but the delamination of films is more severe, which may be attributed to the increase of internal stress in the films.
%K diamond-like carbon
%K nanoindentation
%K nanoscratch
%K biomaterials<br>类金刚石薄膜
%K 纳米压入
%K 纳米划痕
%K 生物材料
%K 钛合金
%K 生物力学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=B7BB4E4D8FBD1DAF&yid=14E7EF987E4155E6&vid=7801E6FC5AE9020C&iid=94C357A881DFC066&sid=F0CB1CC137DFCF2D&eid=82BCA4C44409DD5C&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=6&reference_num=11