%0 Journal Article
%T Acetylene Flow Rate Effect on Morphology and Structure of Carbon Nanotube Thick Films by Low Pressure Chemical Vapor Deposition<br>碳源流量对碳纳米管厚膜形貌和结构的影响
%A CAO Zhang-Yi
%A SUN Zhuo
%A GUO Ping-Sheng
%A CHEN Yi-Wei
%A <br>曹章轶
%A 孙卓
%A 郭平生
%A 陈奕卫
%J 无机材料学报
%D 2006
%I Science Press
%X Carbon nanotube (CNT) films were prepared on nickel foil substrates by low pressure chemical vapor deposition (LPCVD) with acetylene and hydrogen as the precursors. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by scanning electron microscope, transmission electron microscope and Raman spectroscope, respectively. With increasing the acetylene flow rate from 10 to 90sccm, the growth rate of CNT films increases and the thickness increases from 400 to 1000\mum, while the diameter of the CNTs increases from 10 to 300nm. Also, the defects and amorphous phase in the CNT films increase with increasing the acetylene flow rate.
%K carbon nanotubes
%K chemical vapor deposition
%K SEM
%K TEM
%K Raman spectra<br>碳纳米管(CNTs)
%K 化学气相沉积(CVD)
%K 扫描电镜(SEM)
%K 透射电镜(TEM)
%K 拉曼光谱
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=A210CF3881109CA0&yid=37904DC365DD7266&vid=659D3B06EBF534A7&iid=CA4FD0336C81A37A&sid=80A07035DF96B0C4&eid=E203FB1A272C9DD2&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=1&reference_num=15