%0 Journal Article
%T Microstructure and Mechanical Properties of TiN/Si3N4 Nanocomposites<br>TiN/Si3N4纳米晶复合膜的微结构和强化机制
%A KONG Ming
%A ZHAO Wen-Ji
%A WU Xiao-Yan
%A WEI Lun
%A LI Ge-Yang
%A <br>孔明
%A 赵文济
%A 乌晓燕
%A 魏仑
%A 李戈扬
%J 无机材料学报
%D 2007
%I Science Press
%X A microstructure investigation of TiN/Si3N4 nanocomposite films with high hardness was performed by means of high-resolution transmission electron microscope, and a result far from the nc-TiN/a-Si3N4 model was presented. Instead of the isotropic one, TiN was pronounced nanocrystalline columnar grains with dimensions of <10nm in width and >100nm in length. Immiscible Si3N4 interfa-cial phases between TiN nanocolumns with a thickness of about 0.5-0.7nm existed in nanocrystalline structure and formed coherent interfaces with adjacent TiN nanocrystals. A succedent simulation employing two-dimensional TiN/Si3N4 nanomultilayers also implied that due to the template effect of crystalline TiN layers, sputter-deposited amorphous Si3N4 was forced to crystallize and grow epitaxially with TiN layers when its thickness was less than 0.7nm, accompanied by a significant enhancement in film's hardness. Due to the short-range nature of the template effect of TiN layers, the crystalline Si3N4 gradually transformed into amorphous when its thickness exceeded 1.0nm and the coherent interfaces were destroyed as a consequence, with a simultaneous film's hardness decline. By comparing the microstructure and corresponding hardness response of TiN/Si3N4 nanocomposite films with that of the nanomultilayered ones, a new explanation on hardening mechanism of TiN/Si3N4 nanocomposites was proposed.
%K TiN/Si3N4 nanocomposites
%K TiN/Si3N4 nanomultilayers
%K interfacial phase
%K crystallization
%K superhardness effect<br>TiN/Si3N4纳米晶复合膜
%K 纳米多层膜
%K 界面相
%K 晶体化
%K 超硬效应
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=04D8EE84FDF33D3E&yid=A732AF04DDA03BB3&vid=BC12EA701C895178&iid=38B194292C032A66&sid=92DA076AF6760FAC&eid=B34BDD6A690A04C0&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=20