%0 Journal Article
%T CVD Synthesis of Silicon Nitride (SiN) Nanopowders in a Novel Two-stage Fluidized Bed Reactor<br>流态床CVD法纳米氮化硅粉体的制备
%A WANG Yong
%A WO Yin-Hua
%A YAO Kui-Hong
%A ZHU Hong-Liang
%A WANG Nai-Yan
%A <br>王勇
%A 沃银花
%A 姚奎鸿
%A 祝洪良
%A 王耐艳
%J 无机材料学报
%D 2006
%I Science Press
%X Chemical vapor deposition (CVD) using silane and ammonia as reactants was employed to prepare SiN nanopowders in a novel two-stage fluidized bed reactor. The product was characterized by means of X-ray diffraction, transmission electron microscope and Fourier transform infrared spectroscope. Furthermore, optimal processing parameters were presented, and the critical factors for CVD synthesis of SiN nanopowders in the fluidized bed were discussed. The results show that the product is an amorphous silicon nitride with sphere nanomorphology. The synthesis route is promising for scale-up preparation of SiN nanopowders.
%K silicon nitride (SiN)
%K silane
%K fluidized bed
%K chemical vapor deposition (CVD)<br>氮化硅(SiN)
%K 硅烷
%K 流态床
%K 化学气相沉积(CVD)
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=27FEE578E5DF2BDB&yid=37904DC365DD7266&vid=659D3B06EBF534A7&iid=CA4FD0336C81A37A&sid=2001E0D53B7B80EC&eid=94E7F66E6C42FA23&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=7&reference_num=15