%0 Journal Article
%T Spectroscopic Characterization of Boron Doped Tetrahedral Amorphous Carbon<br>掺硼四面体非晶碳膜的微观结构及光谱表征
%A ZHANG Hua-Yu
%A TAN Man-Lin
%A HAN Jie-Cai
%A ZHU Jia-Qi
%A JIA Ze-Chun
%A <br>张化宇
%A 檀满林
%A 韩杰才
%A 朱嘉琦
%A 贾泽纯
%J 无机材料学报
%D 2008
%I Science Press
%X A set of boron doped tetrahedral amorphous carbon (ta-C:B) films were prepared in a filtered cathodic vacuum arc system using boron mixed graphite as targets with weight percentage ranging from 0 to 15%. The chemical bonding states of ta-C:B were studied by X-ray photoelectron spectroscope. The result shows that B is mainly threefold coordinated and the fraction of sp3 hybridized carbon decreases in magnitude with increasing boron content. Raman analysis also shows that the introduction of B in the ta-C:B films facilitates the clustering of sp2 carbon sites which reduces the bonding distortion and intrinsic stress of the films.
%K tetrahedral amorphous carbon
%K XPS
%K Raman spectrum<br>四面体非晶碳(ta-C)
%K XPS
%K Raman光谱
%K 掺硼
%K 四面体非晶碳膜
%K 微观结构
%K 光谱表征
%K Tetrahedral
%K Amorphous
%K Carbon
%K Doped
%K Boron
%K Characterization
%K 内应力
%K 变形
%K 价键
%K 原子
%K 簇化
%K 半峰宽
%K 低频
%K 谱线
%K 杂化
%K 含量
%K 存在
%K 结构形式
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=314A54A7C9E3740E803959E70ADA59FB&yid=67289AFF6305E306&vid=EA389574707BDED3&iid=CA4FD0336C81A37A&sid=F1A8654ADB4E656E&eid=798FBE8DE1A255B1&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=15